Fast Steering Mirrors (FSM) / Piezo Tip-Tilt Mirrors, Active Optics, Beam Steering
Fast steering mirrors based on piezo tip-tilt platforms provide nanoradian-class angular resolution, fast response, and backlash-free flexure motion for beam steering, free-space optical communication, image stabilization, astronomy and laser control.
Video: High-Dynamics FSM Mirror Mounts with Piezo and Voice Coil Drives
These fast tilting mirror systems are used in optics, free-space laser communication, image stabilization, and laser control.
FSMs (Fast Steering Mirrors) Piezo Tip/Tilt Mirrors and Phase Shifters
Fast Voice-Coil Tip/Tilt FSM - Alternative to Piezo
Differential voice-coil linear motors in push-pull configuration
Flexure guided, no backlash
For FSM applications, imaging, and high-dynamics beam steering
Can carry mirrors up to 25 mm / 1" diameter
Optical deflection angle to 8°
While piezo drives can provide higher speed and precision, voice coil motors can provide larger travel ranges. This flexure-guided voice-coil-driven fast steering mirror mount provides precise motion in two orthogonal axes and can be operated with a compact bench-top or OEM controller, model C-413.
S-340 FSM: Piezo Tip/Tilt Mirror Mount Platform for Mirrors and Optics to 4"
20 nrad resolution, excellent position stability
Optical beam deflection to 4 mrad
Parallel kinematics design provides higher precision, stability, and dynamics
No polarization rotation with single moving platform and fixed pivot point
Sub-millisecond response
For optics to 4" diameter
Closed-loop option for higher linearity
The S-340 tip/tilt piezo mirror mount platform allows precision rotation in two orthogonal axes with a fixed pivot point. The parallel-kinematic differential drive enables outstanding angular stability over a wide temperature range. A variety of top platforms are available for thermal adaptation to different mirror materials.
S-331 FSM: Piezo Tip/Tilt Mirror Mount Platform with High Dynamics & Stability
Optical beam deflection to 10 mrad
Parallel kinematics piezo tripod design for enhanced stability, dynamics, and precision
0.1 µrad resolution
10kHz resonant frequency
Position servo-control for high positioning stability
Frictionless, high-precision flexure guiding system
System combination with digital controllers for highest linearity
The S-331 high-dynamics tip/tilt piezo-driven mirror mount platform is based on a parallel-kinematics design. Its high resonant frequency of up to 10kHz provides excellent dynamic behavior with very short step and settling times - ideal for free space optical communication.
S-312 piezo phase shifters are based on a piezo tripod drive. The very stiff and compact design provides sub-millisecond response times and sub-nm level resolution. Piston movement is up to 15 µm. Open- and closed-loop versions are available.
S-224/S-226 miniature piezo tilt mirror systems provide optical beam deflection to 4.4 mrad, nanoradian-level resolution, and sub-millisecond response times. They are equipped with a 15 x 4 mm BK7 glass mirror.
Piezo Phase Shifter Z/Tip/Tilt Platform with Aperture
Parallel kinematics piezo tripod design for enhanced stability, dynamics, and precision
3-axis motion with optical beam deflection to 2.4 mrad and piston movement to 12 microns
Sub-µrad resolution and sub-millisecond response times
Open and closed-loop versions
Zero-backlash high-precision flexure guiding system
10 mm clear aperture
These compact Z-positioners and Z-tip/tilt platforms are based on a parallel-kinematic piezo tripod design. They provide piston movement to 12 microns, tilt angles to 1.2 mrad, and sub-millisecond response times. The tripod design provides excellent angular stability.
Long Travel Piezo FSM: Fast Steering Mirror Platform with 70 mrad Deflection
Compact tip/tilt mirror platform
No polarization rotation with coplanar axes and fixed pivot point
Optical beam deflection to 70 mrad / approx. 4°
Factory installed mirror
Millisecond response, resolution down to nano-radians
Closed-loop position servo-control for high accuracy
Zero-backlash precision flexure guides
Parallel-kinematics design for enhanced dynamics, stability, and accuracy
This compact, high-dynamics tip/tilt mirror platform with piezo drives and flexure guides combines a very large angular range with high dynamics. Its coplanar, orthogonal axes and fixed pivot point eliminate polarization rotation and facilitate integration into compact optical systems.
Custom Piezo FSM: Tip/Tilt + Piston, Mirror Mount Platform for Steering Mirrors and Optics
Resolution to 50 nano-radians
Optical beam deflection to 10 mrad
30 µm linear piston motion for path length adjustment
Coplanar axes eliminate polarization rotation
Sub-millisecond responsiveness
Open-loop and closed-loop versions
For optics up to 25 mm diameter
Backlash-free precision flexure guiding system
Parallel kinematics piezo tripod design for enhanced stability, dynamics, and precision
These piezo tip/tilt/Z mirror mount platforms are based on a parallel-kinematic direct-drive piezo tripod design. They provide high-speed rotation in two axes as well as sub-nanometer linear resolution with sub-millisecond response.
S-330 Piezo FSM: Fast Tip/Tilt Steering Mirror Mount Platform: High-Dynamics, Large Angles
Optical beam deflection to 20 mrad / >1°
Resolution to 20 nrad, excellent position stability
Parallel-kinematics design for enhanced dynamics, stability, and accuracy
Sub-millisecond response
For optics to 50 mm diameter
Choice of open and closed-loop versions
These piezo tip/tilt mirror mount platforms come with three different tilt ranges to 10 mrad and optical deflection to 20 mrad. The parallel-kinematics differential direct-drive system provides fast response, excellent stability, and compact optical integration.
Fast steering mirrors (FSMs) are used wherever laser beams, optical signals, or imaging systems require rapid and extremely precise angular correction. Piezo-driven FSMs can compensate for vibration, atmospheric disturbances, mechanical drift, and beam pointing errors in real time.
Free-Space Optical Communication (FSO): Beam stabilization and satellite-to-satellite laser communication links.
Astronomy & Adaptive Optics: Correction of atmospheric turbulence and image stabilization in large telescopes.
Laser Materials Processing: Dynamic beam steering for precision cutting, drilling, welding, and additive manufacturing.
Microscopy & Life Sciences: Image stabilization, optical alignment, and laser scanning.
Semiconductor Manufacturing: Wafer inspection, lithography, and optical metrology systems.
LIDAR & Remote Sensing: Fast beam positioning and tracking.
Defense & Aerospace: Target tracking, directed energy systems, and airborne optical stabilization.
Interferometry & Metrology: Optical path correction and phase stabilization.
Piezo-Based FSMs vs Other Fast Steering Mirror Technologies
Several actuator technologies are used for fast steering mirrors, each optimized for different performance requirements. Piezoelectric actuators excel in applications requiring the highest precision, fastest response, and exceptional stability.
Technology
Advantages
Limitations
Piezo FSM
Highest resolution, nanoradian precision, kHz bandwidth, no backlash, excellent stability
Smaller angular range than some motorized systems
Voice Coil FSM
Larger travel range, smooth motion, good dynamics
Lower stiffness and lower positioning precision
Galvanometer Mirrors
Large scan angles, common in laser scanning systems
Not optimized for ultra-high stability or nanoradian resolution
Motorized Tip/Tilt Stages
Large angular travel and holding capability
Much slower response, mechanical wear, backlash concerns
For applications such as adaptive optics, optical communication, laser beam stabilization, semiconductor metrology, and precision scientific instrumentation, piezo-based fast steering mirrors are often the preferred solution because they combine high bandwidth, frictionless motion, outstanding repeatability, and long-term stability in a compact package.
Tip/Tilt Stages Catalog
Download the brochure for piezo tip/tilt mirror platforms, phase shifters, fast steering mirrors, and related tip/tilt positioning systems.
