Motorized Tip-Tilt Stages for Optics, Mirrors

A-523 Z-Tip-Tilt Precision Air Bearing / Linear Motor Stage for Alignment

High force / load capacity
Nanometer and sub-microradian resolution
Very low profile
Large 10" platform
Clean room compatible
Frictionless and wear-free air bearing guidance
Can be combined with an X-Y-Theta stage to form a low-profile 6-axis stage

This unique 3-axis air bearing table combines high resolution, speed, and load capacity in a very low profile unit. Driven by 3-phase linear motors and precision guided by air bearings, it can be used for extremely fast and accurate alignment applications in optics, photonics, medical engineering, and other mechatronics applications.

High Precision Tip/Tilt & Z Air Bearing Table Datasheet | Ask a PI Engineer on this Product

N-480 motorized tip/tilt kinematic mount

N-480 Tip/Tilt Kinematic Mounts

High stability
For optics with 0.5", 1", or 2" diameter
Compact design with integrated incremental encoder
Step size 1 µrad
Lifetime greater than 1,000,000,000 steps
Vacuum-compatible versions to 10^-6 hPa available

These tip/tilt kinematic positioners are designed for optics, mirrors, and small loads. They provide resolution and repeatability superior to many goniometric cradles. Spring preloading eliminates backlash, while PiezoMotor ratchet drives allow ultra-high-resolution motion and are self-locking when powered off.

High Resolution Tip/Tilt Kinematic Mount Datasheet | Ask a PI Engineer on this Product

High-Force Piezo-Motor Driven Tip/Tilt + Z Stage Concept

Z, tip, tilt nanopositioning platform with 3 integrated drives, parallel-kinematics tripod design
NEXLINE® PiezoWalk drive is self-clamping with no heat generation at rest
Vacuum compatible / non-magnetic designs feasible
High load capacity
High precision with integrated incremental sensors and picometer-resolution dithering mode

This high-force multi-axis stage is based on PI's patented NEXLINE® self-locking piezo motor drives. These high-precision linear drives were awarded the SEMI Technology Innovation Showcase Award. NEXLINE® technology combines piezo-class precision with the long travel ranges of linear motor technology.

High Force Piezo-Motor Driven Tip/Tilt-Z Stage for Wafer Positioning

Compact Stackable Goniometer

Stackable compact goniometer
Travel range up to 12°
Load capacity to 2 kg

These stackable goniometers are ideal for 2-axis alignment applications where the angular axes should preserve a common pivot point.

Product Details / Manuals, Additional Info

Hexapods - 6DOF: Z/Tip/Tilt + XYZ

Six degrees of freedom
Operation in any orientation
No moving cables for improved reliability and precision
Load capacity from 2 kg to 2000 kg
Ultra-high-resolution bearings for 24/7 applications
Resolution to 0.005 µm
Significantly smaller and stiffer than serial-kinematics systems, with better dynamics
Vacuum-compatible versions available
Linear and rotary multi-axis scans
Virtual pivot point
Sophisticated controller using vector algorithms included
MTBF 20,000 h

PI is a leading manufacturer of high-accuracy hexapods. PI introduced its first hexapod for a precision optical alignment system in an astronomical telescope and provides a large variety of models with load capacity from 2 kg to more than 2,000 kg. PI piezo hexapods and electromechanical hexapods have many advantages over conventional multi-axis positioning systems and hydraulic positioners. They are smaller, offer much higher precision, and most are self-locking. Difference between traditional 6-axis robots and hexapods.

PDF Brochure | More about 6-DOF Platforms / Hexapods

Motorized Z/Tip/Tilt Stages, Goniometers and Air Bearings

Motorized Tip/Tilt Stage Types