Motorized Z/Tip/Tilt Stages, Air Bearing Z/Tip/Tilt Stages

Motorized Tip-Tilt Stages

Tip/Tilt Stage

Piezoelectric Tip-Tilt Stages

Piezo Z and Z/Tip/Tilt Stage
Piezo Tip-Tilt Mirrors
Piezo Tip/Tilt-Platform


A-523 Z-Tip-Tilt Precision Air Bearing / Linear Motor Stage for Alignment

  • High Force / Load
  • Nanometer and Sub-Microradian Resolution
  • Very Low Profile
  • Large 10" Platform
  • Clean Room Compatible
  • Frictionless and Wear Free
  • Can be combined with X-Y-Theta Stage to form low Profile 6-Axis Stage

This unique 3-axis air bearing table combines high resolution, speed and load capacity in a very low profile unit. Driven by 3-phase linear motors and precision guided by air bearings, the unit can be used for extremely fast and accurate alignment applications in optics, photonics, medical engineering and other mechatronics applications.

Air bearing Z/Tip/Tilt Stage

High Precision Tip/Tilt & Z Air Bearing Table Datasheet | Ask a PI Engineer on this Product

N-480 Tip/Tilt Kinematic Mounts

  • High stability
  • For optics with 0.5", 1" or 2" diameter
  • Compact design with integrated incremental encoder
  • Step size 1 µrad
  • Lifetime >1,000,000,000 steps
  • Vacuum-compatible versions to 10-6 hPa available

These tip/tilt kinematic positioners are designed for optics, mirrors and small loads and feature resolution and repeatability superior to that of many goniometric cradles. Spring preloading eliminates backlash. The PiezoMotor Ratchet Drives allow ultra-high-resolution, and are self locking when powered off

Tip/Tilt Stage

High Resolution Tip/Tilt Kinematic Mount Datasheet | Ask a PI Engineer on this Product

N-510 High-Force Piezo-Motor Driven Tip/Tilt +Z Stage

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  • Z, tip, tilt Nanopositioning Platform with 3 Integrated Drives (Parallel Kinematics Tripod Design)
  • NEXLINE® Piezo-Walk Drive is Self Clamping, no Heat Generation at Rest
  • Vacuum Compatible / Non-Magnetic Designs Feasible
  • High Load Capacity 200 N
  • High Precision with Integrated Incremental Sensors + Picometer Resolution Dithering Mode

This high-force multi-axis stage is based on PI's patented NEXLINE® self-locking piezo motor drives. These high-precision linear drives were awarded the SEMI Technology Innovation Showcase Award. NEXLINE® technology combines the advantages of piezo class precision with the long travel ranges of linear motor technology.

PDF Brochure | High Force Piezo-Motor Driven Tip/Tilt-Z Stage Datasheet

High-Force NEXLINE® Z/Tip/Tilt Stage

Hexapods - 6DOF: Z/Tip/Tilt + XYZ

6-Axis Stage

  • Six Degrees of Freedom
  • Operation in Any Orientation
  • No Moving Cables for Improved Reliability and Precision
  • Load Capacity from 2 kg to 2000 kg
  • Ultra-High-Resolution Bearings for 24/7 Applications
  • Resolution to 0.005 µm
  • Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
  • Vacuum-Compatible Versions Available
  • Linear and Rotary Multi-Axis Scans
  • Virtual Pivot Point
  • Sophisticated Controller Using Vector Algorithms Included
  • MTBF 20,000 h

PI is the leading manufacturer of high-accuracy hexapods. The company introduced its first hexapod 2 decades ago for a precision optical alignment system in an astronomical telescope and provides a large variety of different models with load capacity from 2 kg to more than 2,000 kg. PI piezo Hexapods and electro-mechanical Hexapods have many advantages over conventional multi-axis positioning systems and hydraulic positioners. They are smaller, offer much higher precision and most are self-locking. Available in many sizes and configurations.

PDF Brochure | More about 6-DOF Platforms / Hexapods