Z/Tip/Tilt Platforms and Tip/Tilt Stages with Piezo-Drives: Flexure-Guided Precision

• Z & Z-Tip/Tilt Versions
• Resolutions to 0.5 nanometers / 50 nrad
• Capacitive Feedback for Highest Linearity
• Closed-Loop Tilt Range to 2 mrad (200 µm in Z)
• Frictionless, High-Precision Flexure Guiding System
• PICMA® Ceramic Encapsulated Piezo Actuators for Outstanding Lifetime
• 66x66 mm Clear Aperture
• Parallel Kinematics & Metrology provides Enhanced Responsiveness & Multi-Axis Precision

P-518, P-528 and P-558 are piezo-driven, Z/tip/tilt nanopositioning and scanning stages. The open-frame-design enables transmitted-light applications.. These high-resolution, piezo-driven stages provid linear motion to 240µm and angular motion of 2.4 mrad with resolution to 0.5nm and 50nrad, respectively.

PDF Brochure | Piezo Z-Tip-Tilt-Platform Online Datasheet / Manuals, Order Infoo

P-541.Z Piezo Z & Z/Tip/Tilt Open Frame Nano-Positioning Platforms for Microscopy Applications

• Low Profile for Easy Integration: 16.5 mm; 80 x 80 mm Clear Aperture
• 2 Versions: Z and Z/Tip/Tilt
• 100 µm Travel Range, 1 mrad Tilt
• Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
• Choice of Sensors: Capacitive Sensors (Higher Performance) and Strain Gauge (Lower Cost)
• PICMA® Ceramic Encapsulated Piezo Actuators for Outstanding Lifetime
• Combination with Long-Travel M-686 Microscopy Stages

P-541 Piezo-Z stages and Z/tip/tilt stages are optimized for light microscopy, nano-focus and metrology applications. The extremely low profile of only 16.5 mm, a large 80 x 80 mm aperture allow easy integration. XY scanning stages with the same footprint are also available.

PDF Brochure | Piezo Z-Stage and Z-Tip-tilt Platform Product Details, Datasheet / Manuals, Order Info

N-510 High-Force Piezo-Motor Driven Tip/Tilt +Z Stage

• Z, tip, tilt Nanopositioning Platform with 3 Integrated Drives (Parallel Kinematics Tripod Design)
• NEXLINE® Piezo-Walk Drive is Self Clamping, no Heat Generation at Rest
• Vacuum Compatible / Non-Magnetic Designs Feasible
• High Load Capacity 200 N
• High Precision with Integrated Incremental Sensors + Picometer Resolution Dithering Mode

This high-force multi-axis stage is based on PI's patented NEXLINE® self-locking piezo motor drives. These high-precision linear drives were awarded the SEMI Technology Innovation Showcase Award. NEXLINE® technology combines the advantages of piezo class precision with the long travel ranges of linear motor technology.

PDF Brochure | Z-Tip-Tilt Platform Product Details / Manuals, Additional Info

P-562.6CD Tip-Tilt + XYZ + Rot-Z Piezo Flexure Stage: 6-Axis Nanopositioning System

• 6 Motion Axes: Tip/Tilt, XYZ + Rot-Z
• 1 mrad Tilt Angle, to 200 µm Linear Range
• UHV Versions to 10-9 hPa
• Parallel Kinematics / Metrology for Enhanced Responsiveness & Precision
• Capacitive Feedback for Highest Linearity / Stability
• Frictionless, High-Precision Flexure Guiding System
• Excellent Scan-Flatness
• 66x66mm Aperture
• Outstanding Lifetime Due to PICMA® Piezo Actuators

This multi-axis piezo nanopositioning stage is one of the most advanced piezo systems currently available. Its parallel-kinematic design, where all piezo flexure drives act on the same moving platform, and sophisticated digital control algorithms (see E-712 digital piezo controller) make it possible to achieve highly precise coordinated motion in all degrees of freedom, with straightness & flatness in the low nanometer range.

PDF Brochure | 6-DOF Stage Online Datasheet / Manuals, Order Info